Preparation and characterization of RuO2 thin films
- Author
- HUANG, Y. S1 ; LIAO, P. C1
[1] Department of Electronic Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, Province of China - Conference title
- International Symposium on H2 - Fuel Cell - Photovoltaic Systems - 1
- Conference name
- International Symposium on H2 - Fuel Cell - Photovoltaic Systems - 1
- Author (monograph)
- SEBASTIAN, P. Joseph (Editor)1
[1] CIE-UNAM, 62580 Temixco, Morelos, Mexico - Source
Solar energy materials and solar cells. 1998, Vol 55, Num 1-2, pp 179-197 ; ref : 30 ref
- ISSN
- 0927-0248
- Scientific domain
- General chemistry, physical chemistry; Energy
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Caractérisation Composé binaire Conduction métallique Conductivité électrique Constante optique Couche mince Fonction diélectrique Grosseur grain Interaction électron défaut Joint grain Mode phonon Méthode MOCVD Préparation Pulvérisation irradiation Pulvérisation réactive Recuit Relation fabrication propriété Ruthénium oxyde Résistivité résiduelle Spectre Raman Spectrométrie Auger Structure rutile O Ru RuO2 Substrat Si Composé minéral Métal transition composé
- Keyword (en)
- Characterization Binary compounds Metallic conduction Electrical conductivity Optical constants Thin films Dielectric function Grain size Electron-defect interactions Grain boundaries Phonon mode MOCVD Preparation Sputtering Reactive sputtering Annealing Fabrication property relation Ruthenium oxides Residual resistivity Raman spectra AES Rutile structure Inorganic compounds Transition element compounds
- Keyword (es)
- Caracterización Conducción metálica Modo fonón Preparación Relación fabricación propiedad Resistividad residual Estructura rutilo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61N Insulators
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films / 001B70H66N Insulators
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15G Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
- Pacs
- 7361N Insulators
- Pacs
- 7866N Insulators
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1619910
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0927-0248(98)00057-9 
https://dx.doi.org/10.1016/S0927-0248(98)00057-9
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