Displacement sensing using geometrical modulation in reflection mode (GM-RM) of coupled optical waveguides
- Author
- HARONIAN, D1
[1] Department of Interdisciplinary Studies, Faculty of Engineering, Tel-Aviv University, Ramat-Aviv 69978, Tel-Aviv, Israel - Source
Journal of micromechanics and microengineering (Print). 1998, Vol 8, Num 4, pp 323-326 ; ref : 12 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Appareillage essai Capteur déplacement Capteur optique Couche tampon Coupleur optique Etude expérimentale Fibre optique Gravure ionique réactive Mesure déplacement Mesure optique Miniaturisation Mécanique précision Métallisation Procédé voie sèche Résonateur Silicium nitrure Silicium oxyde Structure suspendue Système électromécanique
- Keyword (en)
- Test equipment Displacement sensor Optical sensors Buffer layer Optical couplers Experimental study Optical fibers Reactive ion etching Displacement measurement Optical measurement Miniaturization Precision engineering Metallizing Dry process Resonators Silicon nitrides Silicon oxides Suspended structure Electromechanical system
- Keyword (es)
- Transductor desplazamiento Capa tampón Grabado iónico reactivo Medida óptica Mecánica precisión Procedimiento vía seca Estructura suspendida Sistema electromecánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30B Spatial dimensions (e.g.: position, lengths, volume, angles, displacements, including nanometer-scale displacements)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Pacs
- 0630B Spatial dimensions (eg, position, lengths, volume, angles, displacements, including nanometer-scale displacements)
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1629481
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/8/4/010 
https://dx.doi.org/10.1088/0960-1317/8/4/010
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