Diagnostics of SF6 plasmas by energy-resolved mass spectrometry : influence of the electrode material on internal plasma parameters
- Author
- NÖDING, M1 ; BECKER, F1 ; KASSING, R1
[1] University of Kassel, Institute of Technical Physics, Heinrich-Plett-Strasse 40, 34109 Kassel, Germany - Source
Surface & coatings technology. 1999, Vol 111, Num 1, pp 51-55 ; ref : 10 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Keyword (fr)
- Diagnostic plasma Distribution énergie Etude expérimentale Gaine plasma Gaz plasmagène Gravure ionique réactive Irradiation ion Physique plasma Soufre fluorure Spectrométrie masse
- Keyword (en)
- Plasma diagnostics Energy distribution Experimental study Plasma sheaths Plasma gas Reactive ion etching Ion irradiation Plasma physics Sulfur fluorides Mass spectroscopy
- Keyword (es)
- Distribución energía Gas plasmageno Grabado iónico reactivo Irradiación ión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B40 Plasma interactions (nonlaser) / 001B50B40H Plasma-wall interactions; boundary layer effects
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1634611
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0257-8972(98)00705-1 
https://dx.doi.org/10.1016/S0257-8972(98)00705-1
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