Pulsed laser deposition of InP thin films on sapphire(1 0 0 0) and GaAs(1 0 0)
- Author
- HAFEZ, M. A1 ; ELAMRAWI, K. A1 ; ELSAYED-ALI, H. E1
[1] Department of Electrical and Computer Engineering and the Applied Research Center Old Dominion University, 231 Kaufman Hall, Norfolk, VA 23529, United States - Source
Applied surface science. 2004, Vol 239, Num 1, pp 36-44, 9 p ; ref : 29 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- AFM GaAs InP Pulsed laser deposition RHED SEM Sapphire
- Keyword (fr)
- Composé binaire Couche mince Croissance film Dépôt laser pulsé Indium phosphure Microscopie force atomique Microscopie électronique balayage RHEED Semiconducteur Structure surface Structure îlot Composé minéral In P InP
- Keyword (en)
- Binary compounds Thin films Film growth Pulsed laser deposition Indium phosphides Atomic force microscopy Scanning electron microscopy RHEED Semiconductor materials Surface structure Island structure
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16407727
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(04)00541-0 
https://dx.doi.org/10.1016/S0169-4332(04)00541-0
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