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Structural characteristics of 2024 aluminum alloy plasma-based ion implanted with nitrogen then titanium

Author
LIAO, J. X1 ; XIA, L. F2 ; SUN, M. R2 ; LIU, W. M3 ; XU, T3 ; YANG, C. R1 ; CHEN, H. W1 ; FU, C. L1 ; LENG, W. J1
[1] School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, ChengDu 610054, China
[2] School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001, China
[3] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
Source

Applied surface science. 2005, Vol 240, Num 1-4, pp 71-76, 6 p ; ref : 22 ref

ISSN
0169-4332
Scientific domain
General chemistry, physical chemistry; Crystallography; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
Publisher
Elsevier Science, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
Interlayer Plasma-based ion implantation Sputtering current
Keyword (fr)
Addition azote Addition titane Alliage base aluminium Composition surface Couche intermédiaire Courant critique Diffraction RX Implantation ion Pulvérisation irradiation Spectre photoélectron RX Structure surface Traitement par plasma
Keyword (en)
Nitrogen additions Titanium additions Aluminium base alloys Surface composition Interlayers Critical current XRD Ion implantation Sputtering X-ray photoelectron spectra Surface structure Plasma assisted processing
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness

Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55L Defects and impurities: doping, implantation, distribution, concentration, etc

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy

Pacs
6855J Structure and morphology; thickness

Pacs
6855L Defects and impurities: doping, implantation, distribution, concentration, etc

Discipline
Metals. Metallurgy Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16416342

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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