Sub-micron scale patterning using femtosecond laser and self-assembled monolayers interaction
- Author
- CHANG, Wonseok1 ; CHOI, Moojin1 ; KIM, Jaegu1 ; CHO, Sunghak1 ; WHANG, Kyunghyun1
[1] Nanoprocess Group, Korea Institute of Machinery and Materials, 171 Jang-dong, Yusong-gu, Daejeon 305-343, Korea, Republic of - Source
Applied surface science. 2005, Vol 240, Num 1-4, pp 296-304, 9 p ; ref : 15 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 07.79.Fc Femtosecond laser patterning 81.16.Dn 81.16.Rf Photodecomposition Photooxidation Self-assembled monolayer
- Keyword (fr)
- Alcanethiol Couche autoassemblée Faisceau laser Formation motif Microscopie force atomique Nanostructure Photolithographie Photooxydation Photorésist Structure surface
- Keyword (en)
- Alkanethiol Self-assembled layers Laser beams Patterning Atomic force microscopy Nanostructures Photolithography Photooxidation Photoresists Surface structure
- Keyword (es)
- Alcanotiol Fotooxidación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16D Self-assembly
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication / 001B80A16R Nanoscale pattern formation
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16416368
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2004.06.157 
https://dx.doi.org/10.1016/j.apsusc.2004.06.157
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