On the effect of crystallographic orientation on ductile material removal in silicon
- Author
- O'CONNOR, Brian P1 ; MARSH, Eric R2 ; COUEY, Jeremiah A2
[1] Aerotech, Inc., 101 Zeta Drive, Pittsburgh, PA 15238, United States
[2] The Pennsylvania State University, 21 Reber Building, University Park, PA 16802, United States - Source
Precision engineering. 2005, Vol 29, Num 1, pp 124-132, 9 p ; ref : 19 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier Science, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Critical chip thickness Crystallographic orientation Diamond turning Silicon
- Keyword (fr)
- Angle contact Diamant Direction cristallographique Erosion Etude expérimentale Matériau ductile Microscopie optique Monocristal Mécanique précision Métrologie surface Outil diamant Planéité Silicium Usinage
- Keyword (en)
- Contact angle Diamond Crystallographic direction Erosion Experimental study Ductile material Optical microscopy Single crystal Precision engineering Surface metrology Diamond tool Flatness Silicon Machining
- Keyword (es)
- Angulo contacto Diamante Dirección cristalográfica Erosión Estudio experimental Material dúctil Microscopía óptica Monocristal Mecánica precisión Metrología superficie Diamante Planeidad Silicio Mecanizado
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16459149
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.precisioneng.2004.05.004 
https://dx.doi.org/10.1016/j.precisioneng.2004.05.004
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