Electrical conductivity as a measure of the continuity of titanium and vanadium thin films
- Author
- BURGMANN, F. A1 ; LIM, S. H. N1 ; MCCULLOCH, D. G1 ; GAN, B. K2 ; DAVIES, K. E2 ; MCKENZIE, D. R2 ; BILEK, M. M. M2
[1] Applied Physics, School of Applied Sciences, RMIT University, City Campus, GPO Box 2476V, Melbourne 3001 Victoria, Australia
[2] Applied and Plasma Physics, School of Physics (A28), University of Sydney, Sydney, 2006 NSW, Australia - Source
Thin solid films. 2005, Vol 474, Num 1-2, pp 341-345, 5 p ; ref : 19 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- 07.80 73.01A Electrical properties and measurements Growth mechanism Titanium Vanadium
- Keyword (fr)
- Arc impulsionnel Conductivité électrique Couche mince Couche ultramince Croissance cristalline en phase vapeur Epaisseur Etude expérimentale Faisceau pulsé Microscopie électronique balayage Spectrométrie perte énergie électron Titane Vanadium Dépôt phase vapeur arc cathodique pulsé Substrat C Substrat SiO2 Ti V Composé minéral Métal transition
- Keyword (en)
- Pulsed arc Electrical conductivity Thin films Ultrathin films Crystal growth from vapors Thickness Experimental study Pulsed beam Scanning electron microscopy EEL spectroscopy Titanium Vanadium Pulsed cathodic arc vapour deposition Inorganic compounds Transition elements
- Keyword (es)
- Arco impulsional Haz pulsado
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films / 001B70C61A Metals and metallic alloys
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16460693
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2004.09.020 
https://dx.doi.org/10.1016/j.tsf.2004.09.020
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