Prevention method of a notching caused by surface charging in silicon reactive ion etching
- Author
- KIM, Che-Heung1 2 ; KIM, Yong-Kweon1
[1] School of Electrical Engineering and Computer Science, Seoul National University, Seoul, Korea, Republic of
[2] Samsung Advanced Institute of Technology, Mt 14-1, Nongseo-ri Giheung-eup, Yongin-si, Gyeonggi-do 449-712, Korea, Republic of - Source
Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 2, pp 358-361, 4 p ; ref : 14 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Autoalignement Bridage Couche interfaciale Couche sacrificielle Décollement épitaxique Endommagement Gravure ionique réactive Photorésist Porte pièce Silicium Transducteur interdigital Verre 0710C 8540H
- Keyword (en)
- Self alignment Clamping Interfacial layer Sacrificial layer Lift off Damaging Reactive ion etching Photoresist Work holder Silicon Interdigital transducer Glass
- Keyword (es)
- Autoalineación Apriete Capa interfacial Capa sacrificial Desprendimiento epitáxico Deterioración Grabado iónico reactivo Fotorresistencia Portapieza Silicio Transductor interdigital Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16482929
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/15/2/016 
https://dx.doi.org/10.1088/0960-1317/15/2/016
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