A wireless microsystem for the remote sensing of pressure, temperature, and relative humidity
- Author
- DEHENNIS, Andrew D1 ; WISE, Kensall D1
[1] Center for Wireless Integrated Microsystems, Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI 48109, United States - Source
Journal of microelectromechanical systems. 2005, Vol 14, Num 1, pp 12-22, 11 p ; ref : 30 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Anodic bonding backscatter modulation bimorph sensor capacitive interface electrical feedthrough eutectic bonding passive telemetry relaxation oscillator wireless sensor
- Keyword (fr)
- Capteur mesure Capteur pression Dispositif microélectromécanique Eutectique Fixation anodique Fixation pastille Formation copeau Forme géométrique Humidité relative Mesure humidité Mesure sans contact Mesure température Or Silicium Technologie silicium sur verre Transducteur bimorphe Transducteur capacitif Transducteur enfoui Transducteur pression Télédétection Télémesure
- Keyword (en)
- Measurement sensor Pressure sensors Microelectromechanical device Eutectics Anodic bonding Wafer bonding Chip formation Geometrical shape Relative humidity Humidity measurement Non contact measurement Temperature measurement Gold Silicon Sog Bimorph transducer Capacitive transducer Embedded transducer Pressure transducers Remote sensing Telemetry
- Keyword (es)
- Captador medida Dispositivo microelectromecánico Fijación anódica Formación viruta Forma geométrica Humedad relativa Medida sin contacto Tecnología SOG Transductor bicapa Transductor capacitivo Transductor embebido
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G80 Instrumentation for fluid dynamics
- Discipline
- Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16517547
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2004.839650 
https://dx.doi.org/10.1109/JMEMS.2004.839650
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