High-speed microfabricated silicon turbomachinery and fluid film bearings
- Author
- FRECHETTE, Luc G1 ; JACOBSON, Stuart A2 ; BREUER, Kenneth S3 ; EHRICH, Fredric F2 ; GHODSSI, Reza4 ; KHANNA, Ravi2 ; CHEE WEI WONG2 ; XIN ZHANG5 ; SCHMIDT, Martin A2 ; EPSTEIN, Alan H2
[1] Department of Mechanical Engineering, Université de Sherbrooke, Sherbrooke, QC J1K 2R1, Canada
[2] Gas Turbine Lab and Microsystems Technology Lab, Massachusetts Institute of Technology, Cambridge, MA 02139, United States
[3] Division of Engineering, Brown University, Providence, RI 02912, United States
[4] Department of Electrical and Computer Engineering, University of Maryland, College Park, MD 20742, United States
[5] Department of Manufacturing Engineering, Boston University, Boston, MA 02215, United States - Source
Journal of microelectromechanical systems. 2005, Vol 14, Num 1, pp 141-152, 12 p ; ref : 27 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Bearings lubrication microengines microturbine power MEMS turbomachinery
- Keyword (fr)
- Dispositif microélectromécanique Ecoulement entrée Etude expérimentale Fluidique Grande profondeur Gravure faisceau ionique Gravure ionique réactive Lubrification hydrostatique Machine tournante Microfluidique Monocristal Palier butée Palier lisse Silicium Turbine air Turbine gaz Turbomachine
- Keyword (en)
- Microelectromechanical device Inlet flow Experimental study Fluidics Great depth Ion beam etching Reactive ion etching Hydrostatic lubrication Rotating machine Microfluidics Monocrystals Thrust bearing Journal bearings Silicon Air turbine Gas turbines Turbomachinery
- Keyword (es)
- Dispositivo microelectromecánico Flujo entrada Gran profundidad Grabado haz iónico Grabado iónico reactivo Lubrificación hidrostática Máquina tornante Cojinete empuje Turbina aire
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Discipline
- Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16517561
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2004.839008 
https://dx.doi.org/10.1109/JMEMS.2004.839008
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