ESD defect localization and analysis using pulsed OBIC techniques
- Author
- BEAUCHENE, T1 ; LEWIS, D1 ; TREMOUILLES, D2 ; ESSELY, F1 ; PERDU, P3 ; FOUILLAT, P1
[1] Laboratoire IXL, CNRS UMR 5818, Université Bordeaux 1, 33405 Talence, France
[2] CNES-THALES laboratory, 18 Avenue Edouard Belin, 31401 Toulouse, France
[3] LAAS-CNRS, 31401 Toulouse, France - Conference title
- Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)
- Conference name
- International symposium on microelectronics technology and devices (18 ; Sao Paulo 2003-09-08)
- Author (monograph)
- Martino, J.A (Editor); Pavanello, M.A (Editor); Morimoto, N.I (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 156-165, 10 p ; ref : 7 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-389-X
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Circuit intégré Courant induit Décharge électrostatique Faisceau laser Faisceau optique Intensité faisceau Localisation défaut Modélisation
- Keyword (en)
- Integrated circuit Induced current Electrostatic discharge Laser beam Optical beam Beam currents Defect localization Modeling
- Keyword (es)
- Circuito integrado Corriente inducida Haz láser Haz óptico Localización imperfección Modelización
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16545681
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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