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Defects and electrical consequences in SOI buried oxides

Author
HOVEL, H. J1 ; ALMONTE, M2 ; LEE, J. D2 ; SADANA, D1 ; DOMENICUCCI, A2 ; BETTINGER, J2
[1] IBM Corporation, P.O. BOX 218, Yorktown Hts., NY 10598, United States
[2] Route 52, Hopewell Junction, NY 12533, United States
Conference title
Silicon-on-insulator technology and devices XI (Paris, 28 April - 2 May 2003)
Conference name
Silicon-on-insulator technology and devices (11 ; Paris 2003-04-28)
Author (monograph)
Celler, G (Editor); Fossum, J (Editor); Gamiz, F (Editor); Izumi, K (Editor); Kim, Y.W (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting)
Source

Proceedings - Electrochemical Society. 2003, pp 105-110, 6 p ; ref : 12 ref

ISSN
0161-6374
ISBN
1-56677-375-X
Scientific domain
General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
Publisher
Electrochemical Society, Pennington NJ
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Caractéristique électrique Circuit intégré Courant fuite Endommagement Fabrication microélectronique Gravure ionique réactive Piqûre corrosion Technologie SIMOX Technologie silicium sur isolant
Keyword (en)
Electrical characteristic Integrated circuit Leakage current Damaging Microelectronic fabrication Reactive ion etching Pinhole SIMOX technology Silicon on insulator technology
Keyword (es)
Característica eléctrica Circuito integrado Corriente escape Deterioración Fabricación microeléctrica Grabado iónico reactivo Picadura corrosión Tecnología SIMOX Tecnología silicio sobre aislante
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16545699

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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