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Cleaning of fragile fine structures with cryogenic nitrogen aerosols

Author
SAITO, Hajime1 ; MUNAKATA, Akihiko1 ; ICHISHMA, Daiji1 ; YAMANISHI, Toshiyuki1 ; OKAMOTO, Akira2 ; SAGA, Koichiro2 ; KUNIYASU, Hitoshi2 ; HATTORI, Takeshi2
[1] Sumitomo Heavy Industries, Ltd, 2-1-1, Yato-cho, Nishi-Tokyo, Tokyo 188-8585, Japan
[2] Sony Corporation, Atsugi 243-8585, Japan
Conference title
Cleaning technology in semiconductor device manufacturing VIII (Orlando FL, October 2003)
Conference name
International symposium on cleaning technology in semiconductor device manufacturing (8 ; Orlando FL 2003-10)
Author (monograph)
Ruzyllo, J (Editor); Hattori, T (Editor); Opila, R.L (Editor); Novak, R.E (Editor)
Electrochemical Society, Electronics, Dielectrics Science and Technology Divisions, Pennington NJ, United States (Organiser of meeting)
Source

Proceedings - Electrochemical Society. 2003, pp 289-296, 8 p ; ref : 3 ref

ISSN
0161-6374
ISBN
1-56677-411-X
Scientific domain
General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
Publisher
Electrochemical Society, Pennington NJ
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Dispositif microélectromécanique Fabrication microélectronique Lithographie faisceau électron Nettoyage Poutre cantilever Rapport aspect Silicium nitrure Structure fine
Keyword (en)
Microelectromechanical device Microelectronic fabrication Electron beam lithography Cleaning Cantilever beam Aspect ratio Silicon nitride Fine structure
Keyword (es)
Dispositivo microelectromecánico Fabricación microeléctrica Litografía haz electrón Limpieza Viga cantilever Relación dimensional Silicio nitruro Estructura fina
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16545780

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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