Cleaning of fragile fine structures with cryogenic nitrogen aerosols
- Author
- SAITO, Hajime1 ; MUNAKATA, Akihiko1 ; ICHISHMA, Daiji1 ; YAMANISHI, Toshiyuki1 ; OKAMOTO, Akira2 ; SAGA, Koichiro2 ; KUNIYASU, Hitoshi2 ; HATTORI, Takeshi2
[1] Sumitomo Heavy Industries, Ltd, 2-1-1, Yato-cho, Nishi-Tokyo, Tokyo 188-8585, Japan
[2] Sony Corporation, Atsugi 243-8585, Japan - Conference title
- Cleaning technology in semiconductor device manufacturing VIII (Orlando FL, October 2003)
- Conference name
- International symposium on cleaning technology in semiconductor device manufacturing (8 ; Orlando FL 2003-10)
- Author (monograph)
- Ruzyllo, J (Editor); Hattori, T (Editor); Opila, R.L (Editor); Novak, R.E (Editor)
Electrochemical Society, Electronics, Dielectrics Science and Technology Divisions, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 289-296, 8 p ; ref : 3 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-411-X
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Dispositif microélectromécanique Fabrication microélectronique Lithographie faisceau électron Nettoyage Poutre cantilever Rapport aspect Silicium nitrure Structure fine
- Keyword (en)
- Microelectromechanical device Microelectronic fabrication Electron beam lithography Cleaning Cantilever beam Aspect ratio Silicon nitride Fine structure
- Keyword (es)
- Dispositivo microelectromecánico Fabricación microeléctrica Litografía haz electrón Limpieza Viga cantilever Relación dimensional Silicio nitruro Estructura fina
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16545780
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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