Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor
- Author
- OLIVEIRA, Adeilton C1 2 ; DOI, Ioshiaki1 2 ; DINIZ, José A1 2 ; SWART, Jacobus W1 2 ; SIMOES, Eliphas W3
[1] School of Electrical and Computer Engineering - UNICAMP, P.O. Box 6101, Campinas - SP, Brazil
[2] Center for Semiconductor Components - UNICAMP, P.O. Box 6061, Campinas - SP, Brazil
[3] Laboratory of Integrated Systems - EPUSP, São Paulo - SP, Brazil - Conference title
- Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)
- Conference name
- International symposium on microelectronics technology and devices (18 ; Sao Paulo 2003-09-08)
- Author (monograph)
- Martino, J.A (Editor); Pavanello, M.A (Editor); Morimoto, N.I (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting) - Source
Proceedings - Electrochemical Society. 2003, pp 437-444, 8 p ; ref : 10 ref
- ISSN
- 0161-6374
- ISBN
- 1-56677-389-X
- Scientific domain
- General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
- Publisher
- Electrochemical Society, Pennington NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Bore Capteur intelligent Capteur mesure Caractéristique statique Circuit interface Circuit intégré monolithique Circuit intégré Fabrication microélectronique Fil chaud Matériau dopé Micromachine Microusinage Modèle thermique Modèle électrique Modélisation Résistance électrique Silicium Technologie PMOS Transducteur B Si
- Keyword (en)
- Boron Intelligent sensors Measurement sensor Static characteristic Interface circuit Monolithic integrated circuits Integrated circuits Microelectronic fabrication Hot wire Doped materials Micromachine Micromachining Thermal model Electrical model Modelling Resistors Silicon PMOS technology Transducers
- Keyword (es)
- Captador medida Característica estática Circuito intercara Fabricación microeléctrica Hilo caliente Micromáquina Modelo térmico Modelo eléctrico Tecnología PMOS
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16546110
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Install on your browser
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:9:\"\u0000*\u0000jtitle\";s:37:\"Proceedings - Electrochemical Society\";s:9:\"\u0000*\u0000stitle\";s:23:\"Proc., Electrochem. Soc\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"437\";s:8:\"\u0000*\u0000epage\";s:3:\"444\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0161-6374\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"OLIVEIRA\";s:10:\"\u0000*\u0000aufirst\";s:10:\"Adeilton C\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:13:\"DOI, Ioshiaki\";i:1;s:14:\"DINIZ, Jos\u00e9 A\";i:2;s:16:\"SWART, Jacobus W\";i:3;s:17:\"SIMOES, Eliphas W\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"1-56677-389-X\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:85:\"Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)\";s:8:\"\u0000*\u0000title\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:8:\"\u0000*\u0000place\";s:13:\"Pennington NJ\";s:6:\"\u0000*\u0000pub\";s:23:\"Electrochemical Society\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"8\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:9:\"\u0000*\u0000jtitle\";s:37:\"Proceedings - Electrochemical Society\";s:9:\"\u0000*\u0000stitle\";s:23:\"Proc., Electrochem. Soc\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"437\";s:8:\"\u0000*\u0000epage\";s:3:\"444\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0161-6374\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"OLIVEIRA\";s:10:\"\u0000*\u0000aufirst\";s:10:\"Adeilton C\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:13:\"DOI, Ioshiaki\";i:1;s:14:\"DINIZ, Jos\u00e9 A\";i:2;s:16:\"SWART, Jacobus W\";i:3;s:17:\"SIMOES, Eliphas W\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"1-56677-389-X\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:85:\"Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)\";s:8:\"\u0000*\u0000title\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:8:\"\u0000*\u0000place\";s:13:\"Pennington NJ\";s:6:\"\u0000*\u0000pub\";s:23:\"Electrochemical Society\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"8\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:9:\"\u0000*\u0000jtitle\";s:37:\"Proceedings - Electrochemical Society\";s:9:\"\u0000*\u0000stitle\";s:23:\"Proc., Electrochem. Soc\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"437\";s:8:\"\u0000*\u0000epage\";s:3:\"444\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0161-6374\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"OLIVEIRA\";s:10:\"\u0000*\u0000aufirst\";s:10:\"Adeilton C\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:13:\"DOI, Ioshiaki\";i:1;s:14:\"DINIZ, Jos\u00e9 A\";i:2;s:16:\"SWART, Jacobus W\";i:3;s:17:\"SIMOES, Eliphas W\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"1-56677-389-X\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:85:\"Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)\";s:8:\"\u0000*\u0000title\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:8:\"\u0000*\u0000place\";s:13:\"Pennington NJ\";s:6:\"\u0000*\u0000pub\";s:23:\"Electrochemical Society\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"8\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:9:\"\u0000*\u0000jtitle\";s:37:\"Proceedings - Electrochemical Society\";s:9:\"\u0000*\u0000stitle\";s:23:\"Proc., Electrochem. Soc\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"437\";s:8:\"\u0000*\u0000epage\";s:3:\"444\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0161-6374\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"OLIVEIRA\";s:10:\"\u0000*\u0000aufirst\";s:10:\"Adeilton C\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:13:\"DOI, Ioshiaki\";i:1;s:14:\"DINIZ, Jos\u00e9 A\";i:2;s:16:\"SWART, Jacobus W\";i:3;s:17:\"SIMOES, Eliphas W\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"1-56677-389-X\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:85:\"Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)\";s:8:\"\u0000*\u0000title\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:8:\"\u0000*\u0000place\";s:13:\"Pennington NJ\";s:6:\"\u0000*\u0000pub\";s:23:\"Electrochemical Society\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"8\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Base Search access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:0:\"\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:9:\"\u0000*\u0000jtitle\";s:37:\"Proceedings - Electrochemical Society\";s:9:\"\u0000*\u0000stitle\";s:23:\"Proc., Electrochem. Soc\";s:7:\"\u0000*\u0000date\";s:4:\"2003\";s:9:\"\u0000*\u0000volume\";s:0:\"\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"437\";s:8:\"\u0000*\u0000epage\";s:3:\"444\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0161-6374\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"OLIVEIRA\";s:10:\"\u0000*\u0000aufirst\";s:10:\"Adeilton C\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:4:{i:0;s:13:\"DOI, Ioshiaki\";i:1;s:14:\"DINIZ, Jos\u00e9 A\";i:2;s:16:\"SWART, Jacobus W\";i:3;s:17:\"SIMOES, Eliphas W\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:13:\"1-56677-389-X\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:85:\"Microelectronics technology and devices SBMICRO 2003 (Sao Paulo, 8-11 September 2003)\";s:8:\"\u0000*\u0000title\";s:113:\"Modeling and simulation of static characteristics of a PMOS compatible hot wire principle-based flow micro-sensor\";s:8:\"\u0000*\u0000place\";s:13:\"Pennington NJ\";s:6:\"\u0000*\u0000pub\";s:23:\"Electrochemical Society\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"8\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
arXiv access
