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Charge trapping in high-dose Ge-implanted and Si-implanted silicon-dioxide thin films

Author
NAZAROV, A. N1 ; OSIYUK, I. N1 ; TYAGULSKII, I. P1 ; LYSENKO, V. S1 ; GEBEL, T2 ; SKORUPA, And W3
[1] Institute of Semiconductor Physics, NASU, Prospekt Nauki 45, Kyiv, 03028, Ukraine
[2] Nanoparc GmbH, 01328 Dresden, Germany
[3] Institute of Ion Beam Physics and Material Research, Forschungszentrum Rossendorf, 01314 Dresden, Germany
Conference title
Silicon nitride and silicon dioxide thin insulating films VII (Paris, 28 April - 2 May 2003)
Conference name
Symposium on silicon nitride and silicon dioxide thin insulating films (Paris 2003-04-28)
Author (monograph)
Sah, R.E (Editor); Deen, M.J (Editor); Landheer, D (Editor); Sundaram, K.B (Editor); Brown, W.D (Editor); Misra, D (Editor)
Electrochemical Society, Dielectric Science and Technology, Electronics Division, Pennington NJ, United States (Organiser of meeting)
Source

Proceedings - Electrochemical Society. 2003, pp 144-149, 6 p ; ref : 7 ref

ISSN
0161-6374
ISBN
1-56677-347-4
Scientific domain
General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Condensed state physics; Physics
Publisher
Electrochemical Society, Pennington NJ
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Contact isolant semiconducteur Couche mince Electron Injection porteur charge Injection électron Piège trou Piège électron Piégeage porteur charge Recuit thermique rapide
Keyword (en)
Semiconductor insulator contact Thin film Electrons Charge carrier injection Electron injection Hole traps Electron traps Charge carrier trapping Rapid thermal annealing
Keyword (es)
Contacto aislante semiconductor Capa fina Electrón Inyección portador carga Inyección electrón Captura portador carga Recocido térmico rápido
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F01 Interfaces

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16546138

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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