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Application of the vortex transform to microscopic interferometry

Author
PETITGRAND, Sylvain1 ; BOSSEBOEUF, Alain1 ; GUIRARDEL, Matthieu2
[1] Institut d'Electronique Fondamentale, UMR 8622, Université Paris XI, Bat.220, 91405 Orsay, France
[2] LAAS-CNRS, UPR 8001, 7 Avenue du colonel Roche, 31077 Toulouse, France
Conference title
Optical micro- and nanometrology in manufacturing technology (Strasbourg, 29-30 April 2004)
Conference name
Optical micro- and nanometrology. Conference (Strasbourg 2004-04-29)
Author (monograph)
Gorecki, Christophe (Editor); Asundi, Anand K (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting)
Source

SPIE proceedings series. 2004, pp 9-15, 7 p ; ref : 16 ref

ISBN
0-8194-5380-3
Scientific domain
Electronics; Metrology and instrumentation; Optics; Physics; Telecommunications
Publisher
SPIE, Bellingham WA
Publication country
International
Document type
Conference Paper
Language
English
Keyword (fr)
0760
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G60 Optical instruments, equipment and techniques

Discipline
Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16546633

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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