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Fabrication and characterization of GaN nanorods

Author
CHANG, Ya-Hsien1 ; KUO, H. C1 ; YU, Chang-Chin1 ; HSUEH, Tao-Hung1 ; CHANG, Jung-Wai1 ; LIN, Chia-Feng1 ; WANG, S. C1
[1] Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan, Province of China
Conference title
State-of-the-art program on compound semiconductors XXXVIII = Wide bandgap semiconductors for photonic and electronic devices and sensors III (Paris, 27 April - 2 May 2003) (en)
Conference name
State of the art program on compound semiconductors (38 ; Paris 2003-04-27) = Symposium on wide bandgap semiconductors for photonic and electronic devices and sensors (4 ; Paris 2003-04-27)
Author (monograph)
Stokes, E.B (Editor); Fitch, R.C (Editor); Chang, P.C (Editor); Merfeld, D.W (Editor); Ren, F (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting)
Source

Proceedings - Electrochemical Society. 2003, pp 270-275, 6 p ; ref : 23 ref

ISSN
0161-6374
ISBN
1-56677-349-0
Scientific domain
General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
Publisher
Electrochemical Society, Pennington NJ
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Caractéristique optique Composé binaire Couche épitaxique Déplacement vers le bleu Gallium nitrure Gravure ionique réactive Microscopie confocale Microscopie force atomique Photoluminescence Plasma couplé inductivement Emission latérale Ga N GaN
Keyword (en)
Optical characteristic Binary compound Epitaxial film Blueshift Gallium nitride Reactive ion etching Confocal microscopy Atomic force microscopy Photoluminescence Inductively coupled plasma Edge emission
Keyword (es)
Característica óptica Compuesto binario Capa epitáxica Desplazamiento hacia el azul Galio nitruro Grabado iónico reactivo Microscopía confocal Microscopía fuerza atómica Fotoluminiscencia
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16546960

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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