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Compatibility of polysilicon with HFO2-BASED gate dielectrics for CMOS applications

Author
KAUSHIK, V. S1 ; DEGENDT, S1 ; CARTER, R1 ; CANARD, T1 ; VANDERVORST, W1 ; SCHAEKERS, M1 ; HEYNS, M1 ; CAYMAX, M1 ; YOUNG, E2 ; ROHR, E1 ; ELSHOCHT, S. V1 ; DELABIE, A1 ; CLAES, M1 ; SHI, X1 ; CHEN, J2
[1] Inter-university MicroElectronic Center (IMEC), Kapeldreef 75, 3001 Leuven, Belgium
[2] International Sematech, 2706 Montopolis Drive, Austin Texas 78741, United States
Conference title
ULSI process integration III (Paris, 28 April - 2 May 2003)
Conference name
Symposium on ULSI process integration (3 ; Paris 2003-04-28)
Author (monograph)
Claeys, C.L (Editor); Gonzales, F (Editor); Murota, J (Editor); Fazan, P (Editor); Singh, R (Editor)
Electrochemical Society, Electronics Division, Pennington NJ, United States (Organiser of meeting)
Source

Proceedings - Electrochemical Society. 2003, pp 391-396, 6 p ; ref : 8 ref

ISSN
0161-6374
ISBN
1-56677-376-8
Scientific domain
General chemistry, physical chemistry; Electronics; Electrical engineering; Energy; Physics
Publisher
Electrochemical Society, Pennington NJ
Publication country
United States
Document type
Conference Paper
Language
English
Keyword (fr)
Condensateur Couche mince diélectrique Courant fuite Courant grille Matériau amorphe Polycristal Recuit Revêtement Technologie MOS complémentaire
Keyword (en)
Capacitor Dielectric thin films Leakage current Gate current Amorphous material Polycrystal Annealing Coatings Complementary MOS technology
Keyword (es)
Condensador Corriente escape Corriente rejilla Material amorfo Policristal Recocido Revestimiento Tecnología MOS complementario
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F09 Dielectric, amorphous and glass solid devices

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16546986

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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