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Designing the micro opto mechanical vibration sensor

Author
BORECKI, Michal1 ; KRUSZEWSKI, Jerzy1
[1] Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, 75 Koszykowa Str., 00-662 Warszawa, Poland
Conference title
Lightguides and their applications II (Krasnobrod, 9-11 October 2003)
Conference name
Lightguides and their applications. Conference (2 ; Krasnobrod 2003-10-09)
Author (monograph)
Wojcik, Jan (Editor); Wojcik, Waldemar (Editor)
International Society for Optical Engineering, Bellingham WA, United States (Organiser of meeting)
Source

SPIE proceedings series. 2004, pp 149-153, 5 p ; ref : 5 ref

ISBN
0-8194-5525-3
Scientific domain
Electronics; Optics; Physics; Telecommunications
Publisher
SPIE, Bellingham WA
Publication country
International
Document type
Conference Paper
Language
English
Keyword (fr)
Capteur mesure Capteur vibration Champ libre Dispositif microoptoélectromécanique Fabrication microélectronique Fibre optique Optique intégrée Transformateur Vibration mécanique Vibromètre
Keyword (en)
Measurement sensor Vibration transducer Free field Microoptoelectromechanical device Microelectronic fabrication Optical fibers Integrated optics Transformers Mechanical vibrations Vibrometer
Keyword (es)
Captador medida Transductor vibración Campo libre Dispositivo microoptoelectromecánico Fabricación microeléctrica Vibrómetro
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides

Discipline
Electronics Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
16564287

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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