Silicon microlens structures fabricated by scanning-probe gray-scale oxidation
- Autor
- CHEN, C.-F1 ; TZENG, S.-D1 ; CHEN, H.-Y1 ; GWO, S1
[1] Department of Physics and Institute of Microelectromechanical Systems, National Tsing-Hua University, Hsinchu 300, Taiwan, Province of China - Fuente
Optics letters. 2005, Vol 30, Num 6, pp 652-654, 3 p ; ref : 13 ref
- CODEN
- OPLEDP
- ISSN
- 0146-9592
- Campo Científico
- Electronics; Optics; Telecommunications
- Editor
- Optical Society of America, Washington, DC
- País de la publicación
- United States
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave (fr)
- Anodisation Etude expérimentale Gravure Microlentille Microscopie champ proche Microscopie électronique balayage Microusinage Optique intégrée Procédé fabrication Silicium
- Palabra clave (in)
- Anodizing Experimental study Engraving Microlens Scanning probe microscopy Scanning electron microscopy Micromachining Integrated optics Manufacturing process Silicon
- Palabra clave (es)
- Anodización Estudio experimental Grabado Microlente Microscopía campo próximo Microscopía electrónica barrido Micromaquinado Optica integrada Procedimiento fabricación Silicio
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Disciplina
- Electronics
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 16578775
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1364/OL.30.000652 
https://dx.doi.org/10.1364/OL.30.000652
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