TEM and ellipsometry studies of nanolaminate oxide films prepared using atomic layer deposition
- Author
- MITCHELL, D. R. G1 ; ATTARD, D. J1 ; FINNIE, K. S1 ; TRIANI, G1 ; BARBE, C. J1 ; DEPAGNE, C1 ; BARTLETT, J. R1
[1] Materials and Engineering Science, ANSTO, PMB 1, Menai, NSW 2234, Australia - Source
Applied surface science. 2005, Vol 243, Num 1-4, pp 265-277, 13 p ; ref : 24 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium oxyde Couche mince Ellipsométrie Microscopie électronique transmission Multicouche Méthode ALE Structure surface Titane oxyde Al O Al2O3 Métal transition composé Nanolaminate oxyde O Ti TiO2
- Keyword (en)
- Aluminium oxides Thin films Ellipsometry Transmission electron microscopy Multilayers Atomic layer epitaxial growth Surface structure Titanium oxides
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H65 Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16626871
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2004.09.070 
https://dx.doi.org/10.1016/j.apsusc.2004.09.070
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