Surface acoustic wave properties of proton-exchanged LiNbO3 waveguides with SiO2 film
- Author
- KAO, Kuo-Sheng1 ; CHENG, Chien-Chuan2 ; CHUNG, Chung-Jen3 ; CHEN, Ying-Chung3
[1] Department of Electronics Engineering and Computer Science, Tung-Fang Institute of Technology, Kaohsiung, Taiwan, Province of China
[2] Department of Electronic Engineering, De Lin Institute of Technology, Tucheng, Taipei, Taiwan, Province of China
[3] Department of Electrical Engineering, National Sun Yat-Sen University, Kaohsiung, Taiwan, Province of China - Source
IEEE transactions on ultrasonics, ferroelectrics, and frequency control. 2005, Vol 52, Num 3, pp 503-506, 4 p ; ref : 23 ref
- CODEN
- ITUCER
- ISSN
- 0885-3010
- Scientific domain
- Electronics; Mechanics acoustics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Dispositif onde acoustique Dépôt physique phase vapeur Echange proton Equation parabolique Etude expérimentale Guide onde Hydrogène Ligne retard Lithium niobate Magnétron Onde acoustique surface Onde surface Perte insertion Pulvérisation haute fréquence Radiofréquence Revêtement multicouche Silicium oxyde Spectrométrie Transducteur interdigital 0707M 4335
- Keyword (en)
- Acoustic wave device Physical vapor deposition Proton exchange Parabolic equation Experimental study Waveguide Hydrogen Delay line Lithium niobates Magnetron Acoustic surface waves Surface wave Insertion loss Radiofrequency sputtering Radiofrequency Multilayer coating Silicon oxides Spectrometry Interdigital transducer
- Keyword (es)
- Dispositivo onda acústica Deposición física fase vapor Intercambio protón Ecuación parabólica Estudio experimental Guía onda Hidrógeno Línea retardo Magnetrón Onda superficie Pérdida inserción Pulverización alta frecuencia Radiofrecuencia Revestimiento multicapa Espectrometría Transductor interdigital
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40C Acoustics / 001B40C35 Ultrasonics, quantum acoustics, and physical effects of sound
- Discipline
- Metrology Physics : acoustics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16662990
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TUFFC.2005.1417274 
https://dx.doi.org/10.1109/TUFFC.2005.1417274
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