Structural models and design rules for on-chip micro-channels with sacrificial cores
- Author
- HUBBARD, Neal B1 ; HOWELL, Larry L1 ; BARBER, John P2 ; CONKEY, Donald B2 ; HAWKINS, Aaron R2 ; SCHMIDT, Holger3
[1] Department of Mechanical Engineering, Brigham Young University, 435 Crabtree, Provo, UT 84602, United States
[2] Electrical and Computer Engineering Department, Brigham Young University, 459 Clyde, Provo, UT 84602, United States
[3] School of Engineering, University of California, Santa Cruz, 1156, High Street, Santa Cruz, CA 95064, United States - Source
Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 4, pp 720-727, 8 p ; ref : 18 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium Analyse structurale Corps creux Etude expérimentale Fluidique Microfluidique Microusinage Modèle non linéaire Modélisation Méthode numérique Méthode élément fini Méthode énergétique Processus fabrication Rupture Résistance rupture Silicium oxyde 0710C 8540H
- Keyword (en)
- Aluminium Structural analysis Hollow body Experimental study Fluidics Microfluidics Micromachining Non linear model Modelling Numerical method Finite element method Energy method Production process Ruptures Rupture strength Silicon oxides
- Keyword (es)
- Análisis estructural Cuerpo hueco Modelo no lineal Método numérico Método energético Proceso fabricación Resistencia ruptura
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16669068
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/15/4/008 
https://dx.doi.org/10.1088/0960-1317/15/4/008
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