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Reflexions on the future of microsystems

Author
LANG, W1
[1] Hahn-Schickard-Gesellschaft-Institute of Micromachining and Information Technology (HSG-IMIT), Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany
Source

Sensors and actuators. A, Physical. 1999, Vol 72, Num 1, pp 1-15 ; ref : 33 ref

ISSN
0924-4247
Scientific domain
Physics
Publisher
Elsevier Science, Lausanne
Publication country
Switzerland
Document type
Article
Language
English
Keyword (fr)
Dispositif micromécanique Etude économique Marché Microélectronique Prévision Système électromécanique Microsystemes
Keyword (en)
Micromechanical devices Economic study Markets Microelectronics Forecasting Electromechanical system Microsystems
Keyword (es)
Estudio económico Mercado Microelectrónica Previsión Sistema electromecánico
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Pacs
8540 Microelectronics: LSI, VLSI, ULSI; integrated circuit fabrication technology

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
1667448

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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