Exploration of the ultimate patterning potential achievable with focused ion beams
- Author
- GIERAK, J1 ; BOURHIS, E1 ; PREVEL, B4 ; HANNOUR, A4 ; MELINON, P4 ; PEREZ, A4 ; FERRE, J5 ; JAMET, J.-P5 ; MOUGIN, A5 ; CHAPPERT, C6 ; MATHET, V6 ; COMBES, M. N. Mérat1 ; CHRIQUI, Y1 ; SAGNES, I1 ; MAILLY, D1 ; HAWKES, P2 ; JEDE, R3 ; BRUCHHAUS, L3 ; BARDOTTI, L4
[1] LPN/CNRS, Route de Nozay, 91460 Marcoussis, France
[2] CEMES/CNRS, 29 Rue Jeanne Marvig, BP 4347, 31055 Toulouse, France
[3] RAITH GmbH, Hauert 18, Technologiepark, 44227 Dortmund, Germany
[4] LPMCN, UCB, Lyon I et CNRS, 43 Bd du 11 Novembre 1918, 69622 Villeurbanne, France
[5] LPS, UMR CNRS 8502 Univ. Paris Sud, 91405 Orsay, France
[6] IEF, UMR CNRS 8622, Univ. Paris Sud, 91405 Orsay, France - Conference title
- Micro and Nano Engineering 2004: Proceedings of the 30th International Conference on Micro and Nano Engineering, September 19-22, 2004, Rotterdam, The Netherlands
- Conference name
- International Conference on Micro and Nano Engineering (30 ; Rotterdam 2004-09-19)
- Author (monograph)
- KRUIT, Pieter (Editor)1 ; VAN DER DRIFT, Emile W. J. M (Editor)1
[1] Delft University of Technology, Netherlands - Source
Microelectronic engineering. 2005, Vol 78-79, pp 266-278, 13 p ; ref : 27 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Couche mince magnétique Couche ultramince Défaut surface Endommagement Fabrication microélectronique Haute résolution Limiteur courant Nanotechnologie Propriété magnétique Technologie faisceau ion focalisé
- Keyword (en)
- Magnetic thin films Ultrathin films Surface defect Damaging Microelectronic fabrication High resolution Current limiter Nanotechnology Magnetic properties Focused ion beam technology
- Keyword (es)
- Defecto superficie Deterioración Fabricación microeléctrica Alta resolucion Limitador corriente Nanotecnología Propiedad magnética
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16674911
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2004.12.038 
https://dx.doi.org/10.1016/j.mee.2004.12.038
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arXiv access
