Summary of iso/tc 201 standard: XIX ISO 17331 : 2004 -surface chemical analysis-chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection x-ray fluorescence (TXRF) spectroscopy
- Author
- MORI, Yoshihiro1
[1] R&D Group, Siltronic Japan Corporation, 3434 Shimata, Hikari, Yamaguchi 743-0063, Japan - Source
Surface and interface analysis. 2005, Vol 37, Num 5, pp 522-523, 2 p ; ref : 5 ref
- CODEN
- SIANDQ
- ISSN
- 0142-2421
- Scientific domain
- General chemistry, physical chemistry; Nanotechnologies, nanostructures, nanoobjects; Condensed state physics
- Publisher
- Wiley, Chichester
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- AAS ICPMS TXRF VPD atomic absorption spectroscopy chemical preconcentration inductively coupled plasma mass spectroscopy international standard reference material surface contamination analysis total-reflection x-ray fluorescence spectroscopy vapour-phase decomposition
- Keyword (fr)
- Composition surface Gouttelette Matériau référence Méthode directe Norme ISO Plasma couplé inductivement Réflexion totale Spectre RX Spectre absorption Spectre fluorescence ISO 17331
- Keyword (en)
- Surface composition Droplets Reference material Direct method ISO Inductively coupled plasma Total reflection X-ray spectra Absorption spectra Fluorescence spectrum
- Keyword (es)
- Material referencia Método directo Reflexión total Espectro fluorescencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F20 Metrology / 001B00F20F Units and standards
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35D Composition; defects and impurities
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H70 Other interactions of matter with particles and radiation / 001B70H70E X-ray emission threshold and fluorescence
- Discipline
- Metrology Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16748542
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/sia.2043 
https://dx.doi.org/10.1002/sia.2043
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