Synthesis of alicyclic polymers and characterization of chemical amplified positive photoresists having the same
- Author
- LIU, Jui-Hsiang1 ; HSIEH, Ching-Dong1 ; TSENG, Chun-Chieh1
[1] Department of Chemical Engineering, National Cheng Kung University, Tainan 70101, Taiwan, Province of China - Source
Journal of applied polymer science. 2005, Vol 96, Num 5, pp 1505-1514, 10 p ; ref : 27 ref
- CODEN
- JAPNAB
- ISSN
- 0021-8995
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Wiley, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- chiral copolymerization photoresists structure synthesis
- Keyword (fr)
- Copolymère optiquement actif Copolymérisation radicalaire Etude expérimentale Maléique anhydride copolymère Maléique dérivé copolymère Méthacrylate copolymère Méthacrylate de butyle copolymère Norbornène copolymère Photolithographie Photorésist Photosensibilité Polymère fonctionnel Préparation Relation structure propriété Résist amplification chimique Résist positif Structure moléculaire Méthacrylate de bornyle copolymère Résistance gravure plasma
- Keyword (en)
- Optically active copolymer Radical copolymerization Experimental study Maleic anhydride copolymer Maleic derivative copolymer Methacrylate copolymer Butyl methacrylate copolymer Norbornene copolymer Photolithography Photoresist Photosensitivity Functional polymer Preparation Property structure relationship Chemically amplified resist Positive resist Molecular structure
- Keyword (es)
- Copolímero ópticamente activo Copolimerización radical Estudio experimental Maleico anhídrido copolímero Maleico derivado copolímero Metacrilato copolímero Metacrilato de butilo copolímero Norborneno copolímero Fotolitografía Fotorresistencia Fotosensibilidad Polímero funcional Preparación Relación estructura propiedad Resistencia amplificación química Resistencia positiva Estructura molecular
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D09 Physicochemistry of polymers / 001D09D Organic polymers / 001D09D02 Preparation, kinetics, thermodynamics, mechanism and catalysts / 001D09D02E Polymers with particular properties
- Discipline
- Physical chemistry of polymers
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16751828
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/app.21324 
https://dx.doi.org/10.1002/app.21324
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