Study on GaN epilayer by infrared spectroscopic ellipsometry
- Author
- WANG, J1 2 ; LI, X. Y1 ; LIU, J2 ; HUANG, Z. M3
[1] State Key Laboratories of Transducer Technology, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
[2] School of Information Science and Engineering, Shandong University, Jinan 250100, China
[3] National Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China - Source
Semiconductor science and technology. 2005, Vol 20, Num 6, pp 540-543, 4 p ; ref : 19 ref
- CODEN
- SSTEET
- ISSN
- 0268-1242
- Scientific domain
- Electronics; Optics; Condensed state physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Amortissement Anisotropie Couche épitaxique Densité porteur charge Dopage Effet Hall Ellipsométrie spectroscopique Gallium nitrure Indice extinction Indice réfraction Mobilité porteur charge Paramètre cristallin Plasmon Spectre IR Vibration réseau 78 Ga N GaN
- Keyword (en)
- Damping Anisotropy Epitaxial layers Carrier density Doping Hall effect Spectroscopic ellipsometry Gallium nitrides Extinction index Refractive index Carrier mobility Lattice parameters Plasmons Infrared spectra Lattice vibrations
- Keyword (es)
- Doping Elipsometría espectroscópica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
- Discipline
- Electronics Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16833810
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0268-1242/20/6/010 
https://dx.doi.org/10.1088/0268-1242/20/6/010
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