Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
- Author
- BHATTACHARYA, Shantanu1 ; DATTA, Arindom2 ; BERG, Jordan M2 ; GANGOPADHYAY, Shubhra3
[1] Department of Biological Engineering, University of Missouri, Columbia, MO 65211, United States
[2] Nanotech Center, Texas Tech University, Lubbock, TX 79409, United States
[3] Department of Electrical Engineering, University of Missouri, Columbia, MO 65211, United States - Source
Journal of microelectromechanical systems. 2005, Vol 14, Num 3, pp 590-597, 8 p ; ref : 21 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Advancing contact angle bond strength hydrophilicity hydrophobicity oxygen-plasma poly (dimethyl) siloxane (PDMS) reactive ion etching (RIE)
- Keyword (fr)
- Angle contact Biodétecteur Densité plasma Dispositif microélectromécanique Dépôt chimique phase vapeur Echelle grande Etude expérimentale Fiabilité Fluidique Force adhérence Gravure ionique réactive Mesure Microfluidique Mouillabilité Méthode PECVD Plasma couplé inductivement Processus fabrication Siloxane(diméthyl) polymère Spectrométrie ICP Verre
- Keyword (en)
- Contact angle Biosensors Plasma density Microelectromechanical device CVD Large scale Experimental study Reliability Fluidics Adhesive strength Reactive ion etching Metering Microfluidics Wettability PECVD Inductively coupled plasma Production process Dimethylsiloxane polymer Inductive coupling plasma spectrometry Glass
- Keyword (es)
- Dispositivo microelectromecánico Escala grande Fuerza adherencia Grabado iónico reactivo Proceso fabricación Siloxano(dimetil) polímero Espectrometría ICP
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40G Fluid dynamics / 001B40G85 Applied fluid mechanics / 001B40G85D Fluidics
- Discipline
- Metrology Physics : fluid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16868321
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2005.844746 
https://dx.doi.org/10.1109/JMEMS.2005.844746
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