Investigation of RuO2/Ta2O5 thin film evolution by thermogravimetry combined with mass spectrometry
- Author
- KRISTOF, Janos1 ; SZILAGYI, Tamas1 ; HORVATH, Erzsébet2 ; FROST, Ray L3
[1] University of Veszprém, Department of Analytical Chemistry, P.O. Box 158, 8201 Veszprem, Hungary
[2] University of Veszprém, Department of Environmental Engineering and Chemical Technology, P.O. Box 158, 8201 Veszprém, Hungary
[3] Queensland University of Technology, School of Physical and Chemical Sciences, 2 George Street, GPO Box 2434, 4001, Brisbane, Austria - Source
Thin solid films. 2005, Vol 485, Num 1-2, pp 90-94, 5 p ; ref : 21 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Article
- Language
- English
- Author keyword
- 68.55-a 68.55.Jk 68.55.Nq 81.20.Fw Oxides Fourier transform infrared spectroscopy (FTIR) Ruthenium Tantalum
- Keyword (fr)
- Combustion Couche mince Film Fissuration In situ Ion Métal transition Oxyde Précurseur Revêtement métallique Ruthénium oxyde Solution alcoolique Solvant organique Spectrométrie masse Thermogravimétrie Titane Ru RuO2 Ta Ti
- Keyword (en)
- Combustion Thin films Films Cracking In situ Ions Transition elements Oxides Precursor Metal coating Ruthenium oxides Alcoholic solution Organic solvents Mass spectroscopy Thermogravimetry Titanium
- Keyword (es)
- In situ Revestimiento metálico Solución alcohólica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
- Discipline
- Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16939973
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2005.03.037 
https://dx.doi.org/10.1016/j.tsf.2005.03.037
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