Surface-passivated high-resistivity silicon as a true microwave substrate
- Author
- SPIRITO, Marco1 ; DE PAOLA, Francesco Maria2 ; NANVER, Lis K3 ; VALLETTA, Emanuele3 ; BIFENG RONG1 ; REJAEI, Behzad4 ; DE VREEDE, Leo C. N1 ; BURGHARTZ, Joachim N1
[1] Laboratory of High-Frequency Technology and Components, Delft Institute of Microelectronics and Submicrontechnology, Delft University of Technology, Delft 2600 GB, Netherlands
[2] Department of Electronics and Telecommunications Engineering, University of Naples Federico II,, 80125 Naples, Italy
[3] Laboratory of Electronic Components, Technology and Materials, Delft Institute of Microelectronics and Submicrontechnology, Delft University of Technology, Delft 2600 GB, Netherlands
[4] Nanofacility, Delft Institute of Microelectronics and Submicrontechnology, Delft University of Technology, Delft 2600 GB, Netherlands - Source
IEEE transactions on microwave theory and techniques. 2005, Vol 53, Num 7, pp 2340-2347, 8 p ; ref : 30 ref
- CODEN
- IETMAB
- ISSN
- 0018-9480
- Scientific domain
- Electronics; Optics; Telecommunications
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- High-resistivity silicon (HRS) Marchand balun inductors substrate passivation transformers traveling-wave amplifier (TWA)
- Keyword (fr)
- Amplificateur onde progressive Circuit MMIC Inductance Passivation Résistivité électrique Silicium Substrat Transformateur symétrisation Transformateur
- Keyword (en)
- Travelling wave amplifier MMIC Inductance Passivation Electric resistivity Silicon Substrate Balun Electric transformer
- Keyword (es)
- Amplificador onda progresiva Inductancia Pasivación Resistividad eléctrica Silicio Substrato Transformador simetrización Transformador eléctrico
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16963141
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TMTT.2005.850435 
https://dx.doi.org/10.1109/TMTT.2005.850435
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