Silicon device scaling to the sub-10-nm regime
- Author
- LEONG, Meikei1 ; DORIS, Bruce2 ; KEDZIERSKI, Jakub1 ; RIM, Ken1 ; YANG, Min1
[1] IBM Semiconductor research and Development Center, T. J. Watson Research Center, Yorktown Heights, NY 10598, United States
[2] IBM Semiconductor Research and Development Center, Microelectronic Division, Hopewell Junction, NY 12533, United States - Source
Science (Washington, D.C.). 2004, Vol 306, Num 5704, pp 2057-2060, 4 p ; ref : 33 ref
- CODEN
- SCIEAS
- ISSN
- 0036-8075
- Scientific domain
- Multidisciplinary
- Publisher
- American Association for the Advancement of Science, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Article synthèse Couche ultramince Miniaturisation Mobilité porteur charge Orientation cristalline Structure tunnel Technologie MOS complémentaire
- Keyword (en)
- Review Ultrathin films Miniaturization Charge carrier mobility Crystal orientation Channel structure Complementary MOS technology
- Keyword (es)
- Artículo síntesis Miniaturización Movilidad portador carga Orientación cristalina Estructura túnel Tecnología MOS complementario
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 16996500
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1126/science.1100731 
https://dx.doi.org/10.1126/science.1100731
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