Directional detection of secondary electrons for electron beam profilography
- Author
- SLOWKO, W1
[1] Institute of Microsystem Technology, Wroclaw University of Technology, UI, Janiszewskiego 11/17, 50-372 Wroclaw, Poland - Source
Vacuum. 1999, Vol 52, Num 4, pp 441-449 ; ref : 8 ref
- CODEN
- VACUAV
- ISSN
- 0042-207X
- Scientific domain
- Metallurgy, welding; Physics
- Publisher
- Elsevier, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Détecteur scintillation Détection électron Electron secondaire Méthode étude Reconstruction image SEM Surface Topographie
- Keyword (en)
- Scintillation counters Electron detection Secondary electron Investigation method Image reconstruction SEM Surfaces Topography
- Keyword (es)
- Electrón secundario Método estudio
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A16 Electron, ion, and scanning probe microscopy / 001B60A16B Transmission, reflection and scanning electron microscopy(including ebic)
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35B Surface structure and topography
- Discipline
- Metrology Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1709499
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0042-207X(98)00329-7 
https://dx.doi.org/10.1016/S0042-207X(98)00329-7
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