Novel fabrication of micromechanical oscillators with nanoscale sensitivity at room temperature
- Author
- CHABOT, Michelle D1 ; MORELAND, John M1 ; LAN GAO2 ; LIOU, Sy-Hwang2 ; MILLER, Casey W3
[1] National Institute of Standards and Technology, Boulder, CO 80305, United States
[2] Department of Physics, University of Nebraska, Lincoln, NE 68588, United States
[3] University of Texas, Austin, TX 78723, United States - Source
Journal of microelectromechanical systems. 2005, Vol 14, Num 5, pp 1118-1126, 9 p ; ref : 29 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Cantilevers fabrication magnetic resonance force microscopy (MRFM) magnetometry
- Keyword (fr)
- Capteur force Capteur magnétique Couche ultramince Dispositif microélectromécanique Echelle nanométrique Etude expérimentale Formation motif Fraisage Magnétomètre Mesure force Microscopie force magnétique Modélisation Moment magnétique Monocristal Méthode numérique Méthode élément fini Nanostructure Oscillateur Poutre cantilever Processus fabrication Silicium Technologie faisceau ion focalisé Température ambiante
- Keyword (en)
- Force sensors Magnetic sensors Ultrathin films Microelectromechanical device Nanometer scale Experimental study Patterning Milling Magnetometers Force measurement Magnetic force microscopy Modelling Magnetic moments Monocrystals Numerical method Finite element method Nanostructures Oscillators Cantilever beam Production process Silicon Focused ion beam technology Ambient temperature
- Keyword (es)
- Dispositivo microelectromecánico Método numérico Viga cantilever Proceso fabricación
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17159362
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2005.851869 
https://dx.doi.org/10.1109/JMEMS.2005.851869
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