Laser crystallised poly-Si TFTs for AMLCDs
- Author
- BROTHERTON, S. D1 ; AYRES, J. R1 ; EDWARDS, M. J1 ; FISHER, C. A1 ; GLAISTER, C1 ; GOWERS, J. P1 ; MCCULLOCH, D. J1 ; TRAINOR, M1
[1] Philips Research Laboratories, Redhill, Surrey, RH1 5HA, United Kingdom - Conference title
- E-MRS Spring Conference, Symposium E: Thin Film Materials for Large Area Electronics
- Conference name
- E-MRS Spring Conference, Symposium E: Thin Film Materials for Large Area Electronics (Strasbourg 1998-06-16)
- Author (monograph)
- EQUER, Bernard (Editor)1 ; DREVILLON, B (Editor)1 ; FRENCH, I (Editor); KALLFLAS, T (Editor)
European Materials Research Society, Strasbourg, France (Funder/Sponsor)
[1] Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 CNRS), Ecole Polytechnique, 91128 Palaiseau, France - Source
Thin solid films. 1999, Vol 337, Num 1-2, pp 188-195 ; ref : 14 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Affichage Courant fuite Cristal liquide Cristallisation Effet dimensionnel Epaisseur couche Irradiation laser Matrice active Polycristal Silicium Spectrométrie transitoire niveau profond Technologie MOS complémentaire Transistor couche mince
- Keyword (en)
- Display Leakage current Liquid crystals Crystallization Size effect Layer thickness Laser irradiation Active matrix Polycrystal Silicon Deep level transient spectrometry Complementary MOS technology Thin film transistor
- Keyword (es)
- Visualización Corriente escape Cristal líquido Cristalización Efecto dimensional Espesor capa Irradiación láser Matriz activa Policristal Silicio Espectrometría transitoria nivel profundo Tecnología MOS complementario Transistor capa delgada
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03H Display
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1725550
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0040-6090(98)01176-6 
https://dx.doi.org/10.1016/S0040-6090(98)01176-6
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