Silicon for primary metrology : the effect of hydrogen on its perfection
- Author
- BECKER, P1 ; BETTIN, H1 ; KUETGENS, U1 ; HALLMANN-SEIFFERT, B2 ; RIEMANN, H2
[1] Physikalisch-Technische Bundesanstalt Braunschweig, Bundesallee 100, 38116 Braunschweig, Germany
[2] Institut für Kristallzüchtung, Max-Born-Str. 2, 12489 Berlin, Germany - Source
Journal of physics. D, Applied physics (Print). 2005, Vol 38, Num 22, pp 4109-4114, 6 p ; ref : 19 ref
- CODEN
- JPAPBE
- ISSN
- 0022-3727
- Scientific domain
- Condensed state physics; Physics; Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Détection défaut Hydrogène Mesure masse Paramètre cristallin Silicium Unité mesure Volume moléculaire 0630D Si
- Keyword (en)
- Defect detection Hydrogen Mass measurement Lattice parameters Silicon Units (measurement) Molecular volume
- Keyword (es)
- Detección imperfección Volumen molecular
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30D Mass and density
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17271440
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0022-3727/38/22/015 
https://dx.doi.org/10.1088/0022-3727/38/22/015
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