Selective silicon-on-insulator (SOI) implant : a new micromachining method without footing and residual stress
- Author
- PARK, Sangjun1 ; KWAK, Donghun1 ; KO, Hyoungho1 ; SONG, Taeyong1 ; CHO, Dong-Il1
[1] School of Electrical Engineering and Computer Science, ERC-NBS, ASRI, ISRC, Seoul National University, San 56-1 Shinlim-dong, Gwanak-gu, Seoul 151-742, Korea, Republic of - Source
Journal of micromechanics and microengineering (Print). 2005, Vol 15, Num 9, pp 1607-1613, 7 p ; ref : 13 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Contrainte résiduelle Dispositif microélectromécanique Diélectrique Gyroscope Isolation électrique Largeur bande Microcapteur Microstructure élancée Monocristal Méthode électrique Silicium Stabilité Technologie silicium sur isolant Microusinage substrat
- Keyword (en)
- Residual stresses Microelectromechanical device Dielectric materials Gyroscopes Electrical insulation Bandwidth Microsensors High aspect ratio microstructure HARM Monocrystals Electrical method Silicon Stability Silicon-on-insulator Bulk micromachining
- Keyword (es)
- Dispositivo microelectromecánico Dieléctrico Microestructura esbelta Método eléctrico Micromaquinado substrato
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17273722
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/15/9/001 
https://dx.doi.org/10.1088/0960-1317/15/9/001
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