Coupled distance sensor systems for high-accuracy topography measurement : Accounting for scanning stage and systematic sensor errors
- Author
- ELSTER, Clemens1 ; WEINGFIRTNER, Ingolf2 ; SCHULZ, Michael2
[1] Physikalisch-Technische Bundesanstalt Berlin, Abbestrasse 2-12, 10587 Berlin, Germany
[2] Physikalisch-Technische Bundesanstalt Braunschweig, Bundesallee 100, 38116 Braunschweig, Germany - Source
Precision engineering. 2006, Vol 30, Num 1, pp 32-38, 7 p ; ref : 11 ref
- CODEN
- PREGDL
- ISSN
- 0141-6359
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier Science, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Angular measurement Distance sensor High accuracy High resolution Least-squares Topography Uncertainty
- Keyword (fr)
- Capteur distance Capteur mesure Erreur mesure Estimation erreur Haute résolution Mesure angle Mécanique précision Méthode moindre carré Métrologie surface Précision mesure Système incertain
- Keyword (en)
- Distance sensor Measurement sensor Measurement errors Error estimation High-resolution methods Angular measurement Precision engineering Least square fit Surface metrology Measurement accuracy Uncertain systems
- Keyword (es)
- Sensor distancia Captador medida Estimación error Mecánica precisión Metrología superficie Precisión medida
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00F Metrology, measurements and laboratory procedures / 001B00F30 Measurements common to several branches of physics and astronomy / 001B00F30G Velocity, acceleration and rotation
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17404213
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.precisioneng.2005.04.001 
https://dx.doi.org/10.1016/j.precisioneng.2005.04.001
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