Simple models for piston-type micromirror behavior
- Author
- MILLER, M. H1 ; PERRAULT, J. A2 ; PARKER, G. G1 ; BETTIG, B. P1 ; BIFANO, T. G2
[1] Michigan Technological University, 1400 Townsend Drive, Houghton, MI 49931, United States
[2] Boston University, 15 St Mary's Street, Brookline, MA 02446, United States - Source
Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 2, pp 303-313, 11 p ; ref : 17 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur électrostatique Contrainte résiduelle Dispositif microélectromécanique Effet non linéaire Energie potentielle Energie totale Etude expérimentale Force électrostatique Grand déplacement Machine électrostatique Micromiroir Minimisation Miroir Mode vibration Modulateur optique Modulateur spatial Modélisation Moteur électrique Méthode élément fini Optique intégrée Plaque parallèle Pliage Transducteur capacitif
- Keyword (en)
- Electrostatic actuators Residual stress Microelectromechanical device Non linear effect Potential energy Total energy Experimental study Electrostatic force Large displacement Electrostatic machine Micromirrors Minimization Mirror Vibrational mode Optical modulator Spatial modulator Modeling Electric motor Finite element method Integrated optics Parallel plate Folding Capacitive transducer
- Keyword (es)
- Tensión residual Dispositivo microelectromecánico Efecto no lineal Energía potencial Energía total Estudio experimental Fuerza electrostática Gran desplazamiento Máquina electrostática Minimización Espejo Modo de vibración Modulador óptico Modulador espacial Modelización Motor eléctrico Método elemento finito Optica integrada Placa paralela Doblado Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02C Optical and optoelectronic circuits / 001D03G02C1 Integrated optics. Optical fibers and wave guides
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Electronics Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17477838
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/16/2/015 
https://dx.doi.org/10.1088/0960-1317/16/2/015
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