Relation of hardness and oxygen flow of Al2O3 coatings deposited by reactive bipolar pulsed magnetron sputtering
- Author
- BOBZIN, Kirsten1 ; LUGSCHEIDER, Erich1 ; MAES, Michel1 ; PINERO, Carmen1
[1] Chair of Surface Engineering, RWTH Aachen University, Augustinerbach 4-22, 52062 Aachen, Germany - Conference title
- Proceedings of the 32nd International Conference on Metallurgical Coatings and Thin Films, San Diego, California, May 2-6, 2005
- Conference name
- ICMCTF International Conference on Metallurgical Coatings and Thin Films, Symposiums C, D, F, H and TS-1 (32 ; San Diego, California 2005-05-02)
- Author (monograph)
- STEWART, Alan (Editor)1 ; GALL, Daniel (Editor)2 ; PATSCHEIDER, Jörg (Editor)3 ; PAULEAU, Yves (Editor)4
AVS Science and Technology Society, Advanced Surface Engineering Division, New York, NY, United States (Organiser of meeting)
[1] Boeing Lasers and Electro-Optics, 8531 Fallbrook Ave., MC WB-53, West Hills, CA 91304-3232, United States
[2] Rensselaer Polytechnic Inst., Materials Science and Eng., MRC 204, 110 8th Street, Troy, NY 12180-3590, United States
[3] Lab. for Nanoscale Matls. Sci., EMPA, Ueberlandstr. 129, 8600 Duebendorf, Switzerland
[4] National Polytechnic Institute of Grenoble, CNRS-LEMD, B.P. 166, 25, rue des Martyrs, 38042 Grenoble, France - Source
Thin solid films. 2006, Vol 494, Num 1-2, pp 255-262, 8 p ; ref : 14 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier Science, Lausanne
- Publication country
- Switzerland
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Gamma alumina Machining inconel 718 PVD coatings Pulsed magnetron sputtering Tool coatings
- Keyword (fr)
- Aluminium oxyde Composé binaire Couche épaisse Cristallisation Dureté Dépendance température Etat amorphe Etude expérimentale Grosseur grain Magnétron Morphologie Nanoindentation Pulvérisation réactive Revêtement Al O Al2O3 Spectroscopie émission optique Substrat WC Composé minéral
- Keyword (en)
- Aluminium oxides Binary compounds Thick films Crystallization Hardness Temperature dependence Amorphous state Experimental study Grain size Magnetrons Morphology Nanoindentation Reactive sputtering Coatings Optical emission spectroscopy Inorganic compounds
- Keyword (es)
- Nanoindentacion
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20Q Tribology and hardness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17535405
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2005.08.162 
https://dx.doi.org/10.1016/j.tsf.2005.08.162
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Europe PubMed Central access
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