XPS study of amorphous zirconium oxide films prepared by sol-gel
- Author
- BRENIER, R1 ; MUGNIER, J2 ; MIRICA, E3
[1] Département de Physique des Matériaux UMR CNRS 5586, Université Claude Bernard-LYON I, 43, Boulevard du 11 Novembre 1918, 69622 Villeurbanne, France
[2] Laboratoire de Physico-Chimie des Matériaux Luminescents UMR CNRS 5620, Université Claude Bernard-LYON I, 43, Boulevard du 11 Novembre 1918, 69622 Villeurbanne, France
[3] Materials Engineering Department, Stevens Institute of Technology, Hoboken, NJ, United States - Source
Applied surface science. 1999, Vol 143, Num 1-4, pp 85-91 ; ref : 23 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince Couche ultramince Défaut Effet physique rayonnement Energie liaison Etat amorphe Etude expérimentale Faisceau ion Procédé sol gel Recuit Spectre photoélectron RX Zirconium oxyde O Zr Composé minéral Métal transition composé
- Keyword (en)
- Thin films Ultrathin films Defects Physical radiation effects Binding energy Amorphous state Experimental study Ion beams Sol-gel process Annealing X-ray photoelectron spectra Zirconium oxides Inorganic compounds Transition element compounds
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70I Electron and ion emission by liquids and solids; impact phenomena / 001B70I60 Photoemission and photoelectron spectra / 001B70I60D Adsorbed layers and thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A20 Materials synthesis; materials processing
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 1755741
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(98)00901-5 
https://dx.doi.org/10.1016/S0169-4332(98)00901-5
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