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The nonlinear response of resonant microbeam systems with purely-parametric electrostatic actuation

Author
RHOADS, Jeffrey F1 ; SHAW, Steven W1 ; TURNER, Kimberly L2
[1] Department of Mechanical Engineering, Michigan State University, East Lansing, MI 48824, United States
[2] Department of Mechanical and Environmental Engineering, University of California-Santa Barbara, Santa Barbara, CA 93106, United States
Source

Journal of micromechanics and microengineering (Print). 2006, Vol 16, Num 5, pp 890-899, 10 p ; ref : 23 ref

ISSN
0960-1317
Scientific domain
Electronics; Mechanical engineering
Publisher
Institute of Physics, Bristol
Publication country
United Kingdom
Document type
Article
Language
English
Keyword (fr)
Dispositif microélectromécanique Effet non linéaire Excitation paramétrique Force électrostatique Machine électrostatique Modélisation Rejet Réponse fréquence Résonateur Système non linéaire Transducteur capacitif Transducteur interdigital
Keyword (en)
Microelectromechanical device Non linear effect Parametric excitation Electrostatic force Electrostatic machine Modelling Rejection Frequency response Resonators Nonlinear systems Capacitive transducer Interdigital transducers
Keyword (es)
Dispositivo microelectromecánico Efecto no lineal Excitación paramétrica Fuerza electrostática Máquina electrostática Rechazo Transductor capacitivo
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making

Discipline
Electronics Mechanical engineering. Mechanical construction. Handling Metrology
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
17772789

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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