Electron kinetics in cylindrical discharges of magnetron configurations
- Autor
- GOLUBOVSKII, Yu. B1 ; POROKHOVA, I. A1 ; SUSHKOV, V. P1 ; HOLIK, M2 ; KUDRNA, P2 ; TICHY, M2
[1] St Petersburg State University, Ulianovskaia 1, 195904 St Petersburg, Russian Federation
[2] Charles University in Prague, V Holešovickách 2, 18000, Prague, Czech Republic - Fuente
Plasma sources science & technology (Print). 2006, Vol 15, Num 2, pp 228-236, 9 p ; ref : 21 ref
- ISSN
- 0963-0252
- Campo Científico
- Plasma physics
- Editor
- Institute of Physics, Bristol
- País de la publicación
- United Kingdom
- Tipo de documento
- Article
- Idioma
- Russian
- Palabra clave (fr)
- Argon Cathode creuse Densité électron Décharge électrique Electron secondaire Equation Boltzmann Equation cinétique Etude expérimentale Etude théorique Fonction distribution Hydrodynamique Ionisation Magnétron Particule chargée 5225D Flux particule
- Palabra clave (in)
- Argon Hollow cathodes Electron density Electric discharges Secondary electron Boltzmann equation Kinetic equations Experimental study Theoretical study Distribution functions Hydrodynamics Ionization Magnetrons Charged particles
- Palabra clave (es)
- Electrón secundario
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B25 Plasma properties / 001B50B25D Plasma kinetic equations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B80 Electric discharges / 001B50B80T Other gas discharges
- Disciplina
- Physics of gases, plasmas and electric discharges
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 17772906
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Acceso al documento
Install on your browser
DOI
10.1088/0963-0252/15/2/007 
https://dx.doi.org/10.1088/0963-0252/15/2/007
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:26:\"10.1088\/0963-0252\/15\/2\/007\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:71:\"Electron kinetics in cylindrical discharges of magnetron configurations\";s:9:\"\u0000*\u0000jtitle\";s:43:\"Plasma sources science & technology (Print)\";s:9:\"\u0000*\u0000stitle\";s:36:\"Plasma sources sci. technol. (Print)\";s:7:\"\u0000*\u0000date\";s:4:\"2006\";s:9:\"\u0000*\u0000volume\";s:2:\"15\";s:8:\"\u0000*\u0000issue\";s:1:\"2\";s:8:\"\u0000*\u0000spage\";s:3:\"228\";s:8:\"\u0000*\u0000epage\";s:3:\"236\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0963-0252\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:11:\"GOLUBOVSKII\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Yu. B\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:15:\"POROKHOVA, I. A\";i:1;s:13:\"SUSHKOV, V. P\";i:2;s:8:\"HOLIK, M\";i:3;s:9:\"KUDRNA, P\";i:4;s:8:\"TICHY, M\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:71:\"Electron kinetics in cylindrical discharges of magnetron configurations\";s:8:\"\u0000*\u0000place\";s:7:\"Bristol\";s:6:\"\u0000*\u0000pub\";s:20:\"Institute of Physics\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"9\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante Base Search
