Deposition and characterization of ternary thin films within the Ti-Al-C system by DC magnetron sputtering
- Author
- WILHELMSSON, O1 ; PALMQUIST, J.-P1 ; HULTMAN, L2 ; JANSSON, U1 ; LEWIN, E1 ; EMMERLICH, J2 ; EKLUND, P2 ; PERSSON, P. O. A2 ; HÖGBERG, H2 ; LI, S2 ; AHUJA, R3 ; ERIKSSON, O3
[1] Department of Muterials Chemistry, The Angström Laboratory, Uppsala University, P.O. Box 538, 751 21 Uppsala, Sweden
[2] Department of Physics. IFM, Thin Film Physics Division, Linköping University, 581 83 Linköping, Sweden
[3] Uppsala University, Dept. of Physics, The Angström Laboratory, P.O. Box 530, 751 21 Uppsala, Sweden - Source
Journal of crystal growth. 2006, Vol 291, Num 1, pp 290-300, 11 p ; ref : 50 ref
- CODEN
- JCRGAE
- ISSN
- 0022-0248
- Scientific domain
- Crystallography; Geology; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- A3. PVD Al. Solid solutions Bl. Carbides Bl. MAX-phase Bl. Perovksite
- Keyword (fr)
- Aluminium carbure Composé ternaire Couche mince Diffraction RX Diffusivité Dureté Etat métastable Etude expérimentale Frittage Magnétron Microscopie électronique transmission Mode empilement Module Young Nanoindentation Perovskite Polycristal Pulvérisation cathodique Solution solide Titane carbure Ultravide Al C Ti Substrat Al2O3 TiAlC Composé minéral Métal transition composé
- Keyword (en)
- Aluminium carbides Ternary compounds Thin films XRD Diffusivity Hardness Metastable states Experimental study Sintering Magnetrons Transmission electron microscopy Stacking sequence Young modulus Nanoindentation Perovskite Polycrystals Cathode sputtering Solid solutions Titanium carbides Ultrahigh vacuum Inorganic compounds Transition element compounds
- Keyword (es)
- Modo apilamiento Nanoindentacion
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60B Mechanical and acoustical properties of condensed matter / 001B60B20 Mechanical properties of solids / 001B60B20Q Tribology and hardness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 17775358
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.jcrysgro.2006.03.008 
https://dx.doi.org/10.1016/j.jcrysgro.2006.03.008
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