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Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

Author
VERD, J1 ; URANGA, A1 ; TEVA, J1 ; LOPEZ, J. L1 ; TORRES, F1 ; ESTEVE, J2 ; ABADAL, G1 ; PEREZ-MURANO, F2 ; BARNIOL, N1
[1] Departamento de Enginyeria Electrònica, Universitat Auta de Barcelona, Bellaterra 08193, Spain
[2] Institut de Microelectrònica de Barcelona (IMB-CNM-CSIC), Bellaterra 08193, Spain
Source

IEEE electron device letters. 2006, Vol 27, Num 6, pp 495-497, 3 p ; ref : 9 ref

CODEN
EDLEDZ
ISSN
0741-3106
Scientific domain
Electronics
Publisher
Institute of Electrical and Electronics Engineers, New York, NY
Publication country
United States
Document type
Article
Language
English
Author keyword
CMOS-microelectromechanical system (MEMS) high-frequency resonators integrated resonators mechanical resonators
Keyword (fr)
Caractéristique électrique Circuit intégré CMOS Circuit intégré monolithique Dispositif microélectromécanique Dispositif électromécanique Electronique de mesure Fabrication microélectronique Haute fréquence Procédé voie humide Résonateur Structure mécanique Technologie MOS complémentaire Lithographie sans masque
Keyword (en)
Electrical characteristic CMOS integrated circuits Monolithic integrated circuit Microelectromechanical device Electromechanical device Readout electronics Microelectronic fabrication High frequency Wet process Resonator Mechanical structure Complementary MOS technology Maskless lithography
Keyword (es)
Característica eléctrica Circuito integrado monolítico Dispositivo microelectromecánico Dispositivo electromecánico Fabricación microeléctrica Alta frecuencia Procedimiento vía húmeda Resonador Estructura mecánica Tecnología MOS complementario Litografía sin máscara
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A1 Oscillators, resonators, synthetizers

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
17843234

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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