Thick-film strain and temperature sensors on LTCC substrates
- Author
- HROVAT, Marko1 ; BELAVIC, Darko2 ; KITA, Jaroslaw3 ; HOLC, Janez1 ; DRNOVSEK, Silvo1 ; CILENSEK, Jena1 ; GOLONKA, Leszek3 ; DZIEDZIC, Andrzej3
[1] Jozef Stefan Institute, Ljubljana, Slovenia
[2] HIPOT-R&D, Sentjernej, Slovenia
[3] Wroclaw University of Technology, Wroclaw, Poland - Source
Microelectronics international. 2006, Vol 23, Num 3, pp 33-41, 9 p ; ref : 31 ref
- ISSN
- 1356-5362
- Scientific domain
- Electronics
- Publisher
- MCB University Press, Bradford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Electrical conductivity Films (states of matter) Substrates
- Keyword (fr)
- Capteur température Caractéristique électrique Conductivité électrique Couche épaisse Céramique Détecteur contrainte Effet température Jauge contrainte Matériau fritté Mesure déformation Résistance couche épaisse Résistance couche Résistance électrique Résistivité couche 0707D
- Keyword (en)
- Temperature sensor Electrical characteristic Electrical conductivity Thick film Ceramic materials Strain sensing element Temperature effect Resistance strain gauge Sintered material Deformation measurement Thick film resistor Film resistor Resistor Sheet resistivity
- Keyword (es)
- Sensor temperatura Característica eléctrica Conductividad eléctrica Capa espesa Cerámica Detector tensión Efecto temperatura Gauge tensión Material sinterizado Medición deformación Resistor película espesa Resistor pelicular Resistencia eléctrica(componente) Resistividad capa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F14 Acoustic wave devices, piezoelectric and piezoresistive devices
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18014254
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1108/13565360610680749 
https://dx.doi.org/10.1108/13565360610680749
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