Effects of substrate temperature on electrical and structural properties of copper thin films
- Author
- CHAN, Kah-Yoong1 ; TOU, Teck-Yong1 ; TEO, Bee-San1
[1] Thin Film Laboratory, Faculty of Engineering, Multimedia University, Jalan Multimedia, 63100 Cyberjaya, Selangor, Malaysia - Source
Microelectronics journal. 2006, Vol 37, Num 9, pp 930-937, 8 p ; ref : 32 ref
- ISSN
- 0959-8324
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Author keyword
- Copper Electrical properties Sputtering Substrate temperature Surface morphology
- Keyword (fr)
- Caractéristique électrique Couche mince Croissance film Croissance grain Effet température Grosseur grain Magnétron Microscopie force atomique Microstructure Pression atmosphérique Rugosité Semiconducteur type p Sonde 4 pointes Structure surface Température ambiante Tube hyperfréquence Valeur efficace
- Keyword (en)
- Electrical characteristic Thin film Film growth Grain growth Temperature effect Grain size Magnetron Atomic force microscopy Microstructure Atmospheric pressure Roughness p type semiconductor Four point probe Surface structure Room temperature Microwave tube Root mean square value
- Keyword (es)
- Característica eléctrica Capa fina Crecimiento grano Efecto temperatura Grosor grano Magnetrón Microscopía fuerza atómica Microestructura Presión atmosférica Rugosidad Semiconductor tipo p Sonda 4 puntas Estructura superficie Temperatura ambiente Tubo hiperfrecuencia Valor eficaz
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03E Electronic tubes, masers
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18014271
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mejo.2006.01.011 
https://dx.doi.org/10.1016/j.mejo.2006.01.011
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