Micromechanical hollow-disk ring resonators
- Author
- LI, Sheng-Shian1 ; LIN, Yu-Wei1 ; YUAN XIE1 ; ZEYING REN1 ; NGUYEN, Clark T.-C1
[1] Center for Wireless Integrated Micro Systems Department of Electrical Engineering and Computer Science University of Michigan, Ann Arbor, Michigan 48109-2122, United States - Conference title
- 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004 technical digest)
- Conference name
- IEEE International Conference on Micro Electro Mechanical Systems (17 ; Maastricht 2004)
- Author (monograph)
- Institute of Electrical and Electronics Engineers, United States (Organiser of meeting)
IEEE Robotics and Automation Society, United States (Organiser of meeting) - Source
17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004 technical digest). 2004 ; 1Vol, pp 821-824, 4 p ; ref : 10 ref
- ISBN
- 0-7803-8265-X
- Scientific domain
- Electronics; Metrology and instrumentation
- Publisher
- IEEE, Piscataway NJ
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Dispositif microélectromécanique Domaine fréquence GHz Résonateur anneau Résonateur cavité Silicium polycristallin 0710C 4260D 8585
- Keyword (en)
- Microelectromechanical device GHz range Ring resonator Cavity resonator Polysilicon
- Keyword (es)
- Dispositivo microelectromecánico Resonador anillo Resonador cavidad Silicio policristal
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40B Optics / 001B40B60 Laser optical systems: design and operation / 001B40B60D Resonators, cavities, amplifiers, arrays, and rings
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Discipline
- Electronics Metrology Physics : optics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18025133
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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