Reaction products and oxide thickness formed by Ti out-diffusion and oxidization in poly-Pt/Ti/SiO2/Si with oxide films deposited
- Author
- CHANGHONG CHEN1 2 ; DEXIU HUANG1 2 ; WEIGUANG ZHU3 ; YI FENG2 ; XIGANG WU2
[1] Wuhan National Laboratory for Optoelectronics, Huazhong University of Science & Technology, Wuhan 430074, China
[2] Department of Optoelectronic Engineering, Huazhong University of Science & Technology, Wuhan 430074, China
[3] Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore - Source
Applied surface science. 2006, Vol 252, Num 20, pp 7590-7593, 4 p ; ref : 20 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- 05.70.Np 68.35.Md Diffusion Interface and surface Oxidization Titanium
- Keyword (fr)
- Bicouche Diffusion(transport) Epaisseur Oxygène Perovskites Produit réaction Réaction interface Silicium oxyde Titane oxyde O Si Pt Si SiO2 Ti Métal transition
- Keyword (en)
- Bilayers Diffusion Thickness Oxygen Perovskites Reaction product Interface reaction Silicon oxides Titanium oxides Transition elements
- Keyword (es)
- Producto reacción Reacción interfase
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00E Statistical physics, thermodynamics, and nonlinear dynamical systems / 001B00E70 Thermodynamics / 001B00E70N Interface and surface thermodynamics
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35M Surface energy; thermodynamic properties
- Discipline
- Physics of condensed state : structure, mechanical and thermal properties Theoretical physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 18067120
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2005.12.111 
https://dx.doi.org/10.1016/j.apsusc.2005.12.111
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